窒化物単結晶の製造方法

摘要

PROBLEM TO BE SOLVED: To evaluate crystal quality of a nitride single crystal, in an untouched as-grown state, grown by the ammonothermal process.SOLUTION: The nitride single crystal is grown in a reaction vessel at a grow temperature of ≥500°C, the grown nitride single crystal is subjected to surface treatment while lowering the temperature from the grow temperature, and the surface of the surface-treated nitride single crystal is evaluated.