摘要 |
<p>PURPOSE:To obtain gaseous nitrogen of high purity by discharging a part of equalizing gas to the outside of the system from a connected part of an adsorption tank where and adsorption process is finished and an adsorption tank where regeneration process is finished in an equalizing process. CONSTITUTION:Air, etc., enter an adsorption tank 1 through a valve 5 and gaseous oxygen is adsorbed from them by MSC packed into the tank 1 and the unadsorbed components such as gaseous nitrogen are separated and enter a product storage tank 3 through a valve 9. The supply of feed gas is stopped immediately before the separation performance of MSC in the adsorption tank 1 attains the allowable limits, and valves 5, 9 are closed and valves 11-13 of the adsorption tank 1 where an adsorption process is finished and an adsorption tank 2 where a regeneration process is finished are opened to make product outlets of both tanks 1, 2 communicate with each other and to make feed gas inlets of both tanks 1, 2 communicate with each other at the same time. Then, gas which remains in the adsorption tank 1 under pressure and has higher nitrogen concentration is shifted to the adsorption tank 2 where the regeneration process is finished and internal pressure is lower. At this time, a part of gas shifting due to equalization is discharged to the outside of the system through an orifice 20 to increase the gaseous nitrogen purity.</p> |