| 摘要 |
<p>PURPOSE:To prevent the deterioration in electrical characteristics and to improve image quality and reliability by providing at least a pair of nonlinear elements for driving picture element electrodes in series. CONSTITUTION:A conductor 2 consisting of tantalum, etc., and having an approximately trapezoidal in shape is formed on an element substrate 1 between an inter-element wiring 9 for signal input formed by successively laminating a conductor 6 consisting of tantalum, etc., an insulator 7 consisting of tantalum oxide, etc., and a conductor 8 consisting of chromium, etc., on the substrate 1 and the picture element electrode 5 consisting of ITO, etc. An insulator 3 of tantalum oxide, etc., consisting of an insulating layers 3a and a barrier layer 3b for forming the nonlinear element is formed on the surface of such conductor 2. The conductor 8 for the inter-element wiring 9 extended to the surfaces of the insulator 3 to cover the surface and the part where the conductor 8, the insulating layer 3a and the conductor 2 overlap is formed as the first nonlinear element S1. The part where the conductor 4, the insulating layer 3a and the conductor 2 overlap is formed as the nonlinear element S2.</p> |
