Piezoelectrical actuation system for X=Y positioning table - has two orthogonal spring four corner linkages, with fixed part of one coupled to machine and moving part to fixed part of other, and has path sensor on respective fixed and moving parts of two links for output to position control

摘要

A plate with studs and slots is arranged to enable the motion of spring linkage quadrilaterals (1,2). The quadrilaterals are mutually perpendicular. The fixed part (11) of one is rigidly installed and its moving part (12) coupled to the second one's fixed part (21). The second quadrilateral's moving part (22) represents the x-y positioning table. Displacement sensors are mounted on the moving part of the second and fixed part of the first quadrilateral. Detected coordinate changes are detected by a common transducer (5) whose output signals drive two separate linkage control loops. ADVANTAGE - Requires small space with coarse positioning.