TREATMENT GAS SUPPLYING APPARATUS

摘要

A treatment gas supplying apparatus (1) including a first mixed gas producing section (13) that is configured to produce a first mixed gas in which a first gas (11) and a treatment gas (10) having a treatment effect are mixed with each other in a first ratio; and a second mixed gas producing section (14) that is configured to produce a second mixed gas in which a second gas (12) and the treatment gas (10) are mixed with each other in a second ratio, the second ratio being within a constant difference from the first ratio. The treatment gas supplying apparatus (1) further includes a third mixing section (15) that is configured to produce a mixed gas in which the first mixed gas and the second mixed gas are mixed with each other.