发明名称 SEMICONDUCTOR SUBSTRATE MANIPULATING JIG
摘要 <p>PURPOSE:To provide a semiconductor substrate manipulating jig which can prevent any influence such as external damages on a semiconductor silicon substrate. CONSTITUTION:An attracting portion 1 of a semiconductor substrate manipulating jig is provided in the proximity to the rear surface of a semiconductor silicon substrate and the external circumference of the semiconductor silicon substrate is intentionally attracted and fixed with a stopper portion 2. Thereby, grounding to the center region can be prevented. Accordingly, influence of external damages on the surface of the other adjacent semiconductor silicon substrate can be prevented.</p>
申请公布号 JPH05299490(A) 申请公布日期 1993.11.12
申请号 JP19920106291 申请日期 1992.04.24
申请人 MATSUSHITA ELECTRON CORP 发明人 DOBASHI OSAMU
分类号 B23Q7/04;B25J15/06;H01L21/677;H01L21/68;(IPC1-7):H01L21/68 主分类号 B23Q7/04
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