| 摘要 |
PURPOSE:To provide an energy dispersed X-ray analysis device capable of keeping the inside of a protection container in a high vacuum. CONSTITUTION:A heating current is supplied to a heater 9 from a heating power source 11 to heat the heater 9 and then a chemically reacting material 8 disposed in proximity to the heater 9 is evaporated by the heat of the heater 9. Particles of magnesium (Mg) evaporated are adsorbed on the interior wall of a protection container 1 and a deposition film of magnesium (Mg) is formed on the interior wall of the container 1. As a result, steam and gas generated inside the container are adsorbed by the deposition film. The gas is adsorbed by the deposition film partly through physisorption but is mostly firmly adsorbed through chemical reactions, so that not much of the gas is released even with temperature rises inside the protection container. Also, formation of such a deposition film on the interior wall of the container is effected whenever necessary, whereby the adsorbing ability of the deposition film can be maintained. |
