Measuring composition of gas mixture of excimer laser with high accuracy - by producing corona discharge in gas mixture to determine at least one pair of current-voltage curves associated with discharge

摘要

A discharge current is specified for determining the current and voltage values in the corona discharge, and the associated corona voltage (Uc) is measured. The gas mixture contains an inert carrier gas, to which is added an electron negative gas or a gaseous chemical compound with an electron negative component. The measurement takes place in the gas circulation circuit of the excimer laser. A constant current source (20) is provided for the corona discharge and a discharge gap (10) is formed between a plate (14) and an electrode tip (12). A voltmeter (22) determines the voltage drop (Uc). ADVANTAGE - High accuracy, can be used directly in gas circuit of excimer laser without taking gas samples.