Device and method for micro displacement

摘要

A fine displacement device for establishing a measured micro displacement includes first and second plate members disposed in spaced relation to each other to define a gap therebetween with the plate members being secured to each other at opposed portions thereof. An internally threaded hole is formed through one plate member perpendicular thereto and an externally threaded screw is fastened in the hole with an end of the screw abutting against the other plate member. Upon turning the screw in one direction, the plate members will be deformed elastically in a direction perpendicular to the plate members and a distance between a plane of the first plate member and a deformed portion of the first plate member is used as a measure for establishing the micro displacement.