| 摘要 |
PURPOSE:To provide the optical waveguide which has high dimensional accuracy, is inexpensive and has excellent mass productivity by depositing soot within a groove formed on a glass substrate, vitrifying the soot and forming the groove as a light propagation region. CONSTITUTION:The groove 2 of a recessed shape is formed by a photolithography method and ion etching method within one surface of the quartz glass substrate 1. The soot 3 formed by adding GeO2 and P2O5 to SiO2 is then deposited on the surface formed with the groove 2 of the glass substrate 1. While the quartz glass substrate 4 is superposed on the soot 3 in tight contact therewith, the substrate is heated to vitrify the soot 3 and to pack the soot in the groove 2, by which the light propagation region 5 is formed. The similar groove is formed on a glass substrate 4 as well and the substrates 1, 4 are joined to each other by holding the soot 3 therebetween. By which, the light propagation region is formed in these two glass substrates 1, 4, and therefore an optical three-dimensional circuit having a high scale of integration is obtd. |
