| 摘要 |
PURPOSE:To allow long time stabilized operation by applying a positive voltage onto a heat-exchanger disposed in a laser tube thereby removing negatively charged metal dust. CONSTITUTION:Laser gas is circulated through a gas circulator 3 disposed in a laser tube 1 thus forming a high speed laser gas flow in a discharge space 7 defined between discharge electrodes 2. Circulation of laser gas brings the laser gas 6 containing metal dust generated through discharge into contact with the surface of a heat-exchanger 4 applied with a positive voltage from a power supply 5. In this regard, majority of metal dust in the laser gas is attracted to the surface of the heat-exchanger 4 and fixed thereto because it is charged negatively. This constitution reduces metal dust in laser gas significantly, prolongs lifetime of laser gas and optical window, and realizes long time stabilized operation while furthermore prevents degradation of performance of laser system because there is no problem of insufficient insulation. |
