| 摘要 |
PURPOSE:To prevent the generation of delamination in manufacturing a ceramic multilayer wiring board by eliminating irregular deformation during the lamination of a green sheet. CONSTITUTION:A green sheet S to be laminated, held by a pair of holders 2, 3, is fixed to a positioning pin 9. A side holding member 5 of a square-frame form is placed at a distance of 50-250mum from the periphery of the sheet S. In this state, the green sheet S is pressed vertically to laminate each sheet S. The laminating conditions set are: pressure 40kgf/cm<2> or more; temperature 80-150 deg.C; atmospheric pressure 60-76cm/Hg. |
