| 摘要 |
PURPOSE:To increase the accuracy and the efficiency of mass spectrometry by optically and directly measuring the shape and the depth of the surface of a sample during the impact of the primary ions of an SIMS and accurately limiting a detecting region within a flat and wide region and also accurately measuring the depth thereof. CONSTITUTION:This mass spectrometer is provided with an electrostatic sector 5 for directing to the outside of an optical axis secondary ions 3 extracted from the surface of a sample S in a vertical direction and an interference microscope 10 in which a luminous flux is introduced prependicularly into a region for the primary ions 2 of the sample S to be applied to and then a reflected luminous flux is made to interfere with a reference luminous flux and the shape of the surface of the region for ions to be applied to is measured from the interference fringe thereof to accurately measure the shape of the flat part of the bottom of a crater formed by the impact of the primary ions and then adjust the opening of a slit 7 for limiting a visual field so that a region under mass spectrometry accords with or suits the flat region. |
