| 摘要 |
PURPOSE:To automatically and continuously carry out quantitative analysis successively after qualitative analysis, by making quantitative calculation in consideration of the discriminant result of sample properties by the state of a sample stand and by whether the inside of a sample chamber is vacuous or not. CONSTITUTION:A sample stand 16 is mounted on a sample stand mounting part 9 so that a pin 19 is downward (or upward) located, a solid (or liquid) sample 24 is mounted on the mounting surface 23, thereafter a shield cover is closed, and a sample chamber is tightly shut. Where the pin 19 is downward, the mounting of the sample stand 16 is detected by a sample stand sensor 15, and an on signal (a) is outputted to a CPU 30. A signal (c) for driving a vacuum pump 6 is outputted from the CPU 30, and the inside of a sample chamber is evacuated. Upon reaching a fixed degree of vacuum, a detection signal (d) is outputted from a vacuum sensor 31 to the CPU 30. Here, by switching on, an X-ray source 13 is operated, the measurement is started with primary X-rays 10. In the case of a liquid sample, evacuating is not carried out because of lack of the output from the sensor 15 because the pin 19 is upward. |
