| 摘要 |
PURPOSE:To provide a semiconductor fabricating apparatus for accelerating crystallization of anon-single-crystal semiconductor with a desired thickness and by uniform light annealing. CONSTITUTION:Optic devices (53,55,56,59) for linearly focusing light of only ultraviolet light generated by an ultraviolet light generator (54) and a non-single- crystal semiconductor which can generate electromotive force by light application are placed so that the focused linear ultraviolet light (57) is applied to them. Together with them, a moving table (61) for moving the non-single-crystal semiconductor approximately perpendicularly to a lengthwise direction of the linear ultraviolet light and a moving table driver for driving the moving table (61) to scan the focused linear ultraviolet light (57) are provided in order to accelerate crystallization by light-annealing in the vicinity of a surface of the non-single-crystal semiconductor. |
