| 摘要 |
<p>PURPOSE:To provide a multilayer interconnection board, in which a high-speed superconducting element like a Josephson device can function effectively for an electric signal transferred in a circuit wiring at high speed. CONSTITUTION:In a multilayer interconnection board, an insulating film 2 made of high polymer material and a circuit wiring film 3 are laminated alternately on a base insulating board 1. Each circuit wiring film 3 on upper and lower sides are electrically connected through a through hole 5 in the insulating film 2. The wall length of the through hole 5 in cross section should be 160mum or above.</p> |
