| 摘要 |
<p>PURPOSE:To provide an apparatus with low dust-generating properties, which is used in a clean room to suppress the generation of very fine particles and improved in dust-wiping properties by a clean wiper, etc. CONSTITUTION:The attraction parts 12 of a carrier arm 11 for vacuum- attracting and carrying a silicon wafer 13 are formed by one material selected from a group of materials having mutual wear and abrasion resistance, in which the materials neither wear the silicon wafer 13 nor are worn by the wafer 13, and high dust-wiping properties by a wiper, etc., e.g. polyacetal resin, polyether-imide resin, polyamide resin, polyamide-imide resin and poly- butyleneterephthalate resin.</p> |
