| 摘要 |
<p>PURPOSE:To provide a ultrasonic horn which improves stability of bonding by providing a vibration generation source to both sides of a horn supporter and by controlling the vibration generation source by separate output in a bonding device wherein the ultrasonic horn is attached to a bond arm. CONSTITUTION:A ultrasonic horn 20 has vibration generation sources 26, 27 at both sides of a horn supporter 28 and an oscillation device 40 which controls the vibration generation sources 26, 27 by separate output is provided. Thereby, vibration energy of the oscillation generation sources 26, 27 attached to a bonding tool side from the horn supporter 28 is not required to pass through the horn supporter 28. This therefore has an effect to reduce useless movement of the horn supporter 28 involved in transfer of energy to a bonding tool. Furthermore, since both sides of the horn supporter 28 become close to symmetry, characteristics variation of the vibration generation sources 26, 27 themselves is also effective for reducing rate of influence to the horn supporter 28.</p> |
