| 发明名称 |
CHEMICAL LIQUID TREATMENT SUBSTRATE HOUSING CASSETTE |
| 摘要 |
<p>PURPOSE:To provide a chemical liquid treatment substrate housing cassette wherein chemical liquid is less attached to substrates. CONSTITUTION:The side boards 1 and 2 of a substrate housing cassette are formed into shapes which are nearly of parallelogram in cross section parallel to a substrate K and a direction in which chemical liquid that is attached to substrates flows down receding from the substrates K.</p> |
| 申请公布号 |
JPH06224167(A) |
申请公布日期 |
1994.08.12 |
| 申请号 |
JP19930008971 |
申请日期 |
1993.01.22 |
| 申请人 |
MATSUSHITA ELECTRIC IND CO LTD |
发明人 |
HAKODA SHUZO;INOUE ISAMU;KURODA HIROSHI;MATSUNAGA KOJI |
| 分类号 |
B65D85/86;B65D85/38;G02F1/13;H01L21/304;H01L21/673;H01L21/68;(IPC1-7):H01L21/304 |
主分类号 |
B65D85/86 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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