| 摘要 |
PURPOSE:To detect quickly the thickness and compsn. of each layer by irradiating excitation X-rays to a laminated body consisting of >=2 layers of a single phase or alloy phase at varied wavelengths and incident angles, measuring the intensities of the fluorescent x-rays therefrom and making calculation by the prescribed equation. CONSTITUTION:The conditions for at least one among the wavelength distribution and incident angle of the excitation X-rays and the wavelength and taking-out angle of the fluorescent X-rays are changed and the intensities of the fluorescent X-rays are measured by as much as the thickness and the number of components to be quantitatively analyzed. The thickness of each layer and the element compsn. are then calculated in accordance with the prescribed equations defining the relations among the intensity of the measured fluorescent X-rays, the wavelength distribution and incident angle of the excitation X-rays and the wavelength and taking-out angle of the fluorescent X-rays and the relations among the intensity of the fluorescent X-rays, the thickness and the compsn. For example, the thickness and element compsn. of the 1st layer are determined by making incident the excitation X-rays at the small incident angle on the 1st layer and measuring the fluorescent X-rays while averting the influence from the other layers. The thickness and compsn. of the other layers are similarly determined by selecting suitably the measuring conditions of the excitation X-rays and measuring the fluorescent X-rays. The exact and easy determination of the thickness and compsn. of each layer of the laminated body is thus made possible. |
