| 摘要 |
PURPOSE:To obtain a charged particle beam device which has a good operating property and can select the field of view in a short time. CONSTITUTION:The signal from a secondary electron detector 1 is fed to an operation unit 2. The signal from the operation unit 2 is added to the signal from an operation unit 3 in an adder 4. The added signal is stored in a frame memory 5. The signal stored in the frame memory 5 is fed to a cathode-ray tube 7 by the control of a control device 6. And the signal stored in the frame memory 5 is fed to the above operation unit 3 by the control of the control device 6. Furthermore, the control device 6 feeds a signal to indicate alpha=0 in the first scanning of the electron beam to the operation units 2 and 3, and then feeds a signal to indicate a random alpha value in the scanning thereafter. |
