发明名称 OPTICAL APPARATUS
摘要 <p>An optical apparatus, which may be used as an ellipsometer, or as an apparatus to measure the refractive index of a sample, comprises a unit (10) for emitting a beam (B1) of polarised light onto a sample (12), the unit (10) being rotatable to rotate the plane of polarisation of the incident beam (B1), and a photodetector (14) for receiving the beam (B2) reflected from the sample. Preferably the angle of incidence of the beam on the sample can be altered.</p>
申请公布号 WO1994023282(A1) 申请公布日期 1994.10.13
申请号 GB1994000723 申请日期 1994.04.05
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