发明名称 PRODUCTION OF THIN-FILM SEMICONDUCTOR DEVICE
摘要 <p>PURPOSE:To realize the liquid crystal display having an excellent pixel holding characteristic by decreasing the off-leak currents of thin-film transistors(TFTs) with simple stages. CONSTITUTION:Only the Nch TFTs in the regions of L<off> from the ends of gate electrodes are selectively made into an LDD structure by remaining a gate insulating film and implanting ions thereto. The off-leak currents of the pixel switching TFTs and the soaring up of the off-leak currents are decreased. Consequently, the liquid crystal display which lessens flickering and unequal display and has the excellent pixel holding characteristic is realized. Photolithographic stages are not increased.</p>
申请公布号 JPH06301056(A) 申请公布日期 1994.10.28
申请号 JP19930088864 申请日期 1993.04.15
申请人 SEIKO EPSON CORP 发明人 TAKENAKA SATOSHI
分类号 G02F1/136;G02F1/1368;H01L21/336;H01L29/78;H01L29/786;(IPC1-7):G02F1/136;H01L29/784 主分类号 G02F1/136
代理机构 代理人
主权项
地址