| 摘要 |
PURPOSE:To process a secondary electron signal or a reflecting electron signal or the like in the same way as an X-ray signal in an EDS. CONSTITUTION:In a secondary electron signal, a level is adjusted in a level adjusting circuit 11, and a high frequency noise is removed by an LPF12, and it is converted into a pulse having density corresponding to a signal level by a VF converter 13. The pulse outputted from the VF converter 13 is shaped further in a waveform equivalent to a waveform of a pulse outputted from an EDS detector 1 by a waveform shaping circuit 14. Thereby, since a desired external signal such as the secondary electron signal can be treated equally as an X-ray signal obtained by the EDS detector 1, when this signal is inputted to a MCA3, and it can be processed variously by using a function possessed by the MCA3. |
