| 摘要 |
<p>PURPOSE:To provide an acceleration sensor which prevents an erroneous operation of a succeeding device even if a wire connecting the sensor with a substrate is disconnected. CONSTITUTION:Terminals 451-455 of strain gauges 44a-44d formed on a silicon substrate 40 are connected to relay terminals 531-535 on a ceramic substrate 51 by wires 521-525. High resistances 541-544 are printed on the ceramic substrate 51, which are connected in parallel to the corresponding strain gauges. The presence of high resistances does not influence the detection of an acceleration by the bridge circuit in the normal state. For example, if the wire 525 is disconnected, the voltage at the relay terminal 535 becomes a specific voltage determined by the dividing ratio between the high resistances 543, 544, and therefore the abnormality of the sensor can be detected at a succeeding circuit.</p> |
