Systems and Methods for In-Situ Formation of Nanoparticles and Nanofins

摘要

Systems and methods for forming nanoparticles in-situ are disclosed herein. The nanoparticles may be formed in-situ through thermocycling a solution comprising at least one of a molten salt, a surfactant, and a catalyst. The nanoparticles may form in the solution itself and/or on surfaces of a vessel in which the solution is formed. Nanofins may be formed from the agglomeration of particles in the solution and on surfaces. Microchannels may be formed by these nanofins, and in some cases microchannels on a surface may have nanofins form on the surface. In some embodiments, a previously formed solution that has nanoparticles formed in-situ may be used to generate nanofins in a vessel, on a wafer in a vessel, in the solution itself, or combinations thereof.

主权项

1. A method for fabricating nanostructures comprising:
(a) forming a homogeneous solution in a vessel, wherein the homogenous solution comprises a first component and a second component, and wherein the first component and the second component do not comprise nanoparticles; (b) evaporating at least some of a liquid in the homogenous solution after (a); (c) precipitating a first plurality of nanoparticles from the homogeneous solution in response to (a) or (b), wherein the first plurality of nanoparticles is formed on an interior surface of the vessel or in the homogeneous solution spaced apart from the interior surface of the vessel; and (d) forming a first plurality of nanofins on the interior surface of the vessel with the first plurality of nanoparticles after (c).