| 摘要 |
PURPOSE:To obtain data on an important area in a sample analyzing area in a short time in an electron beam analyzer. CONSTITUTION:In the electron beam analyzer constituted in such a way that an electron beam 2 is radiated on a sample 3 and surface observation or elementary analysis of the sample 3 is carried out by detecting a signal generated from the sample 3 by this radiation, the analyzer has a stage scanning means 12 to scan two-dimensionally the electron beam 2 or an X-Y stage 11 to support the sample 3 and an area order designating means 13 to designate scanning order of small analysis areas in an analysis area of the sample 3 composed of plural small analysis areas. The stage scanning means 12 is controlled by this area order designating means 13, and the electron beam 2 or the X-Y stage 11 is scanned two-dimensionally according to the scanning order designated in the area order designating means 13. |
