发明名称 Method of fabricating similar indexed dissociated chips
摘要 PCT No. PCT/DE91/00871 Sec. 371 Date Jun. 3, 1993 Sec. 102(e) Date Jun. 3, 1993 PCT Filed Nov. 11, 1991 PCT Pub. No. WO92/10852 PCT Pub. Date Jun. 25, 1992.Similar semiconductor chips (12-15), which are produced together on a plate and subsequently dissociated, are provided with identifying markings (17-20) containing their earlier position on the plate. If defects occur later in the dissociated chips, analyses can be made to determine whether defects occur with particular frequency in certain regions of the plate, or whether a statistical distribution exists.
申请公布号 US5376589(A) 申请公布日期 1994.12.27
申请号 US19930070371 申请日期 1993.06.03
申请人 ROBERT BOSCH GMBH 发明人 THIENEL, CHRISTOPH
分类号 H01L21/66;H01L21/301;H01L23/544;(IPC1-7):H01L21/302 主分类号 H01L21/66
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