| 摘要 |
PURPOSE:To reduce the spacing of a preliminary ionization space, stabilize discharge, and increase the number of repetitions by laying out peaking capacitors adjacent to an anode side main discharge electrode and a cathode side main discharge electrode along the main discharge electrode alternately in a zigzag manner. CONSTITUTION:Peaking capacitors 3 laid out being adjacent to anode side main discharge electrode 2a and peaking capacitors 3 laid out being adjacent to a cathode side main discharge electrode 2b are laid out along a main discharge electrode 2 alternately in a zigzag manner. Therefore, only one pin 5 for generating preliminary ionization ultraviolet rays is laid out at one peaking capacitor 3, thus reducing the spacing of an adjacent preliminary ionization space 4. Therefore, regardless of the size of the peaking capacitor 3, the spacing of the preliminary ionization space 4 can be reduced, thus obtaining a pulse laser oscillation device with a stable discharge, a number of repetitions, or a high discharge energy density. |
