| 摘要 |
PURPOSE:To simplify processes for the active matrix liquid crystal display device for which a-SiTFts of a positive stagger type are used by improving light shielding films for decreasing off currents. CONSTITUTION:The light shielding films 11S, 11D are formed as the same layers as source-drain electrodes 12S, 12D and are formed between both electrodes 12S and 12D or in superposition on these electrodes 12S, 12D, by which light shielding regions parting the sources and the drains are formed in channel regions. Insulating films for the light shielding films are thereby omitted and the processes are simplified. |
