| 摘要 |
<p>PURPOSE:To provide a ferroelectric substance thin film element having an optically smooth and transparent surface, a high refractive index and orientative property. CONSTITUTION:An organic metallic compound precursor is applied onto a monocrystal borad 1 to form the thin film of an organic metallic compound precursor. Thermal decomposition treatment and sucessively crystallization treatment are applied to this thin film to form an oxide ferroelectric thin film 2 epitaxial or high orientative and transparent. As the organic metallic compound precursor, a metallic alkoxide which is a reaction product between an organic compound having a boiling point of 80 deg.C or higher and metal and a mixture of plural organic metallic compounds selected from metallic salt, etc., or these reaction products are used.</p> |
