| 摘要 |
<p>PURPOSE:To prevent the effect of the laser trimming of the upper resistance element on the lower resistance element of a multilayer resistance module which is formed by superposing at least a pair of film resistance elements through the intermediary of an insulating layer. CONSTITUTION:A film resistance element R1, on which a conductor terminals 7 and 8 are connected to the opposing end of a resistance film pattern 6 consisting of a thick film or a thin film, is formed on an insulated substrate 2. A film resistance element 7 is coated with an insulating layer 4 on which a tantalum pentoxide layer 10 is laminated on a polyimide layer 9, and a film resistance element R2, on which conductor terminals 12 and 13 are connected to the opposing end of a resistance film pattern 11 consisting of thin film, is formed on the insulating layer 4 keeping away from the region A where trimming grooves 21 and 22 will be formed on the resistance film pattern 6 penetrating the insulating film 4.</p> |
