| 摘要 |
<p>PURPOSE:To provide a field emission type cold cathode not only having the good uniformity of field emission, realizing low-voltage drive, and obtaining high field emission efficiency but also easy in high integration, and a manufacturing method thereof excellent in productivity. CONSTITUTION:This cold cathode is provided with a supporting base board 6, a protruded part 7 wherein an emitter-material-made tip formed on the surface of this supporting base board 6 is sharpened, an insulator layer 8 wherein the tip part of the emitter-material-made protruded part 7 is exposed to coat the emitter-material-made protruded part 7 surface, and a high concentration impurity diffusion layer 9. A gap, between the tip part of the emitter-material- made protruded part 7 and the high concentration impurity diffusion layer 9, can be correctly controlled by the film thickness of the insulator layer 8 to form a cold cathode, resultantly obtaining high field emission efficiency.</p> |
