发明名称 |
Chemical Sensors Based on Plasmon Resonance in Graphene |
摘要 |
Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided. |
申请公布号 |
US2016341662(A1) |
申请公布日期 |
2016.11.24 |
申请号 |
US201615225339 |
申请日期 |
2016.08.01 |
申请人 |
International Business Machines Corporation |
发明人 |
Avouris Phaedon;Farmer Damon B.;Li Yilei;Yan Hugen |
分类号 |
G01N21/552;H01L21/04;H01L21/56;H01L21/02 |
主分类号 |
G01N21/552 |
代理机构 |
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代理人 |
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主权项 |
1. A testing apparatus comprising:
a graphene-based SPR sensor comprising: a conductive layer, a dielectric layer on the conductive layer, and graphene on a side of the dielectric layer opposite the conductive layer; a light source adjacent to a first side of the graphene-based SPR sensor proximal to the graphene; and a detector adjacent to a second side of the graphene-based SPR sensor proximal to the conductive layer. |
地址 |
Armonk NY US |