发明名称 Chemical Sensors Based on Plasmon Resonance in Graphene
摘要 Techniques for forming nanoribbon or bulk graphene-based SPR sensors are provided. In one aspect, a method of forming a graphene-based SPR sensor is provided which includes the steps of: depositing graphene onto a substrate, wherein the substrate comprises a dielectric layer on a conductive layer, and wherein the graphene is deposited onto the dielectric layer; and patterning the graphene into multiple, evenly spaced graphene strips, wherein each of the graphene strips has a width of from about 50 nanometers to about 5 micrometers, and ranges therebetween, and wherein the graphene strips are separated from one another by a distance of from about 5 nanometers to about 50 micrometers, and ranges therebetween. Alternatively, bulk graphene may be employed and the dielectric layer is used to form periodic regions of differing permittivity. A testing apparatus and method of analyzing a sample using the present SPR sensors are also provided.
申请公布号 US2016341662(A1) 申请公布日期 2016.11.24
申请号 US201615225339 申请日期 2016.08.01
申请人 International Business Machines Corporation 发明人 Avouris Phaedon;Farmer Damon B.;Li Yilei;Yan Hugen
分类号 G01N21/552;H01L21/04;H01L21/56;H01L21/02 主分类号 G01N21/552
代理机构 代理人
主权项 1. A testing apparatus comprising: a graphene-based SPR sensor comprising: a conductive layer, a dielectric layer on the conductive layer, and graphene on a side of the dielectric layer opposite the conductive layer; a light source adjacent to a first side of the graphene-based SPR sensor proximal to the graphene; and a detector adjacent to a second side of the graphene-based SPR sensor proximal to the conductive layer.
地址 Armonk NY US