| 摘要 |
<p>Ultrapure gas and pure water feed duct, system and process equipment which do not cause deposition of manganese at all near the surface of the weld and in the gas feed systems and can prevent the staining of a semiconductor device or the like into which the gas is fed through the gas feed systems. The duct is characterized in that the weld zone is formed from an austenitic stainless steel material having a manganese concentration of 0.03 wt.% or below. The system is characterized in that the weld zone is formed by welding the ducts made from an austenitic stainless steel material having a manganese concentration of 0.03 wt.% or below, that no deposition of manganese near the weld occurs at all as welded, and that the corrosion resistance is high. The equipment is characterized in that the weld zone is formed from an austenitic stainless steel material having a manganese concentration of 0.03 wt.% or below, that no deposition of manganese near the weld occurs at all as welded, and that the corrosion resistance is high. Preferably, the chromium content is 17.0-18.0 wt.% and the nickel content is 14.0-15.0 wt.%.</p> |
