发明名称 Process and device for energy transducer oscillation amplitude measurement
摘要 <p>A process and a device for carrying out the process for the ultrasonically bonding wire connection of electrical circuits on metal system carriers are proposed. <??>The device (100) essentially comprises a bonding-head means (50) with an energy transducer (50) arranged on it. The energy transducer (50) is fed into the respective process point (P) of the system carrier (46) and a first voltage is applied to it to produce a longitudinal oscillation amplitude. A measuring head (55) arranged in a fixed position on a machine base (60) is allocated to the bonding-head means (50). <??>The measuring head (55) has an optical/electrical sensor (52) by means of which the instantaneous amplitude of the longitudinal oscillation as well as the extent of the infeed movement of the bonding-head device (50) are measured, and a correction factor is determined by calculation from the measured variables determined and is calibrated with the correction factor of the first ultrasonic value for the oscillation amplitude of the energy transducer (25). <IMAGE> </p>
申请公布号 HK103495(A) 申请公布日期 1995.07.07
申请号 HK19950001034 申请日期 1995.06.29
申请人 ESEC SA 发明人 FELBER ARMIN;NEHLS WALTER
分类号 G01H9/00;B23K20/10;H01L21/60;H01L21/607;(IPC1-7):B23K20/10 主分类号 G01H9/00
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