发明名称 |
Process for the production of a layer system and layer system. |
摘要 |
The invention relates to a process for the production of a multiple layer system when, of two layers in contact with one another, at least one grows epitaxially and the two components A and B are not completely soluble in one another. A and B are jointly deposited in a transition region while observing various boundary conditions. A subsequent heat treatment then produces the separate layers. …<IMAGE>… |
申请公布号 |
EP0510555(B1) |
申请公布日期 |
1995.07.26 |
申请号 |
EP19920106724 |
申请日期 |
1992.04.18 |
申请人 |
FORSCHUNGSZENTRUM JUELICH GMBH |
发明人 |
MANTL, SIEGFRIED, DR.;BAY, HELGE, DR. |
分类号 |
H01L21/20;C30B23/02;C30B25/02;C30B25/18;C30B33/00;H01L21/203;H01L21/28 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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