发明名称 Process for the production of a layer system and layer system.
摘要 The invention relates to a process for the production of a multiple layer system when, of two layers in contact with one another, at least one grows epitaxially and the two components A and B are not completely soluble in one another. A and B are jointly deposited in a transition region while observing various boundary conditions. A subsequent heat treatment then produces the separate layers. …<IMAGE>…
申请公布号 EP0510555(B1) 申请公布日期 1995.07.26
申请号 EP19920106724 申请日期 1992.04.18
申请人 FORSCHUNGSZENTRUM JUELICH GMBH 发明人 MANTL, SIEGFRIED, DR.;BAY, HELGE, DR.
分类号 H01L21/20;C30B23/02;C30B25/02;C30B25/18;C30B33/00;H01L21/203;H01L21/28 主分类号 H01L21/20
代理机构 代理人
主权项
地址