METHOD OF INSPECTING A SPECIMEN AND SYSTEM THEREOF

摘要

There are provided a method of generating an inspection recipe usable for inspecting an inspection area of a specimen and a recipe generating unit. The recipe generating unit is configured: upon obtaining design data informative of design structural elements comprised in a design PoI corresponding to the at least one PoI, to provide global segmentation of a test image captured by an inspection tool unit from the inspection area and comprising at least one test PoI of substantially the same design as the at least one PoI, thereby to obtain segmented structural elements comprised in the test PoI and segmentation configuration data; to associate the segmented structural elements comprised in the test PoI with the design structural elements comprised in the design PoI, thereby to obtain design association data; and to generate an inspection recipe comprising, at least, segmentation configuration data and design association data.

主权项

1. A computerized method of generating an inspection recipe usable for inspecting an inspection area of a specimen, the inspection area comprising at least one pattern of interest (PoI), the method comprising:
upon obtaining design data informative of design structural elements comprised in a design PoI corresponding to the at least one PoI, providing global segmentation of a test image captured from the inspection area and comprising at least one test PoI of substantially the same design as the at least one PoI, thereby obtaining segmented structural elements comprised in the test PoI and segmentation configuration data; associating the segmented structural elements comprised in the test PoI with the design structural elements comprised in the design PoI, thereby obtaining design association data; and generating an inspection recipe comprising, at least:
segmentation configuration data configured to be used for local segmentation of at least one inspection PoI in an inspection image to be captured from the inspection area, the local segmentation to yield inspection structural elements; anddesign association data configured to be used for associating at least part of the inspection structural elements with the design structural elements.