| 摘要 |
<p>PURPOSE:To provide the method and device for overlapping planar members for accurately overlapping two planar members by applying a certain degree of preload to the planar members held by an equalize mechanism according to any simple method and rotating the planar members with small force as much as possible in the case of overlapping the surfaces of both the planar members each other while using the equalize mechanism. CONSTITUTION:In the case of overlapping a face 1101 of a TFT substrate 11 held at a lower holding part 5 to a face 901 of a color filter substrate 9 held at an upper holding part 3 above the lower holding part 5 by letting the lower holding part 5 get close to the upper holding part 3 by moving an elevating table 703 upward while touching this color filter substrate 9 with the TFT substrate 11, an XY table 701 is moved within a horizontal plane so as to draw a fine and cubic track when letting the lower holding part 5 get close to the upper holding part 3, and a holding plate 513 is rotationally moved within a fine range with supporting shafts 505 and 511 as a center.</p> |
