| 摘要 |
<p>PURPOSE:To reduce gas discharged from an electrode part, prevent a film from being peeled from the obtained heat treated film, and secure desired characteristics by performing a heat treatment with a predetermined quantity of carbon or the like remaining in the boundary and inside of particles on the surface of the electrode part. CONSTITUTION:A rinsing time with an organic solvent or water for further cleaning an electron gun electrode part which has been cleaned with an organic solvent or water soluble detergent is controlled, followed by a heat treatment at a high temperature with a predetermined quantity of carbon or the like residing in the boundary and inside of particles at the surface of the electrode part. In this case, an Ar laser beam of 1mumphi-1mmphi is radiated on the boundary and inside of the particles of a heat treated film formed on the electrode so that the number of wave(cm-<1>) of the generated Raman beam obtained by a microscopic laser Raman analysis film quality evaluation method has plural kinds of one or two or more peaks within a predetermined wavelength. Namely, a thermally oxidizing film is formed by a very little quantity on the surface by one or two or more peaks in 290-370cm-<1>, 400- -550cm<-1>,... 1540-1590cm<-1>.</p> |
