| 摘要 |
PURPOSE:To provide an angular-velocity sensor whose structure can be made simple by a method wherein a piezoelectric element for drive and a piezoelectric element for detection are formed on the same face. CONSTITUTION:One to a plurality of piezoelectric elements 3 for drive and one to a plurality of piezoelectric elements 4a, 4b for detection are arranged and installed on the support main face 20 of a diaphragm 2 having the support main face 20 which is nearly parallel to the axial center of a rotation. When an electric field is applied to the piezoelectric elements 3 for drive, the' piezoelectric elements 3 for drive are expanded and contracted in a direction which is parallel to the support main face 20, i.e., in the z-axis direction. As a result, the diaphragm 2 is bent in the y-axis direction. When an angular acceleration acts on the diaphragm 2, Coriolis' force in a direction which is perpendicular to the bend direction is applied to the diaphragm 2, and the piezoelectric elements 4a, 4b which are arranged and installed on the diaphragm 2 generate a signal voltage according to Coriolis' force. |
