发明名称 |
K CELL TYPE VAPOR SOURCE HAVING AN IMPROVED SHUTTER |
摘要 |
This invention relates to a K cell type vapor source used for film deposition by a MBE method and a reactive co-evaporation. The K cell comprises a crucible, a small orifice above the crucible through which the crucible emits a molecular beam, and a shutter which substantially opens and closes the small orifice so as to control the molecular beam. According to the present invention, the crucible radiates sufficient heat so as to prevent overheating when the shutter is closed so that the crucible emits a stable molecular beam immediately after the shutter is opened.
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申请公布号 |
CA2153754(A1) |
申请公布日期 |
1996.01.13 |
申请号 |
CA19952153754 |
申请日期 |
1995.07.12 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD. |
发明人 |
NAKAMURA, TAKAO;IIYAMA, MICHITOMO |
分类号 |
C30B25/16;C23C14/24;C30B23/06;H01L21/203;(IPC1-7):C30B35/00 |
主分类号 |
C30B25/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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