SEMICONDUCTOR DEVICE AND PRODUCTION PROCESS THEREOF

摘要

PURPOSE:To attain a high speed modulation and switching of an electric or optical signal by utilizing the phenomenon that electrons or light propagating in a thin semiconductor wire transfers one thin semiconductor wire to another. CONSTITUTION:Waveguides 118 and 119 are composed of two needle-like crystals solid crossing on a base board. For the waveguides made of GaAs, a buried layer 112 uses AlGaAs. Then electron input/output electrodes 113-116 and a control electrode 117 for switching flows of electrons are formed. Electrons entering the waveguide 118 from the electrode 113 partly transfer to the other waveguide 119 at a midway cross part during propagating on that waveguide. On the electrodes 115 and 116 an output of electrons is observed at a certain ratio. The ratio of electrons on these electrodes can be changed by a voltage applied to the electrode 117. Thus, high speed switching of electric or optical signals can be made.