| 摘要 |
PURPOSE:To provide a laser working device by which the working position accuracy of an approximately singular micron can be realized. CONSTITUTION:A working lens 45 and a fine alignment optical system 11 with an NA larger than that of the working lens 45 are mounted on a vertically moving stage 14. A monitor picture from the fire alignment optical system is processed by a fine picture processing part 12, and position information necessary for a fine alignment is calculated. The vertically moving stage i6 driven by a stage control part 16 according to position information from the fine picture processing part, and fine focusing is performed. After aligning with an alignment mark, a work stage is driven by a predetermined distance to make a work position in a working area. |
