| 摘要 |
PURPOSE:To provide a dynamical quantity sensor wherein a low offset voltage can be obtained under such a condition of high temperature even though it has an inexpensive and simple structure and high sensitivity. CONSTITUTION:The title sensor is provided with a strain generating body 1 having an insulation layer and resistors 4a, 4b, 4c and 4d that are formed through plasma spraying in such a way that first and second electrodes 2a, 2b, 2c and 2d and 3a, 3b, 3c and 3d formed on the insulation layer may be connected with each other, respectively. Thus, a dynamical quantity sensor that has a simple and inexpensive structure and high performance and its production method can be provided. |
