| 摘要 |
<p>PURPOSE: To provide an electronic thin film component which exhibits excellent adhesiveness and sufficient conductivity without fatiguing. CONSTITUTION: An electronic thin film component is provided with a substrate, bottom electrode, top electrode, optional one or more electrode layers for an intermediate electrode and a functional intermediate layer. The electrode layer is conductive and includes oxide compound. Therefore, at least one electrode layer is composed of a specific oxide, such as TiOx, where, 1<=x<=2 and EuOx, where, 1<=x<=2, or a physical mixed material and/or solid solution of an oxide compound, or a physical mixed material and/or solid solution of an oxide compound to which a compound or a metal of 50 wt.% or less is added.</p> |
