| 摘要 |
PURPOSE: To provide a semiconductor yaw rate sensor which can be structured easily at low cost and which can detect acceleration precisely. CONSTITUTION: A movable section 14 is installed at a specified distance from a semiconductor substrate. Static electrocity force of the movable section 14 oscillates fixed electrodes for excitation 902, 903 by force. A vertical displacement detecting section 906 detects a vertical displacement of the movable section 14 while a horizontal displacement detecting section 904 detects a horizontal displacement of the movable section 14. A signal processing circuit 909 obtains a yaw rate detection output, using at least the detection output of the vertical displacement detecting section 906. A secular change correcting circuit 910 detects an amplitude of the movable section, using the outputs of the vertical displacement detecting means 904, 906, and keeps a frequency due to forced oscillation at a resonance frequency. |
