WAFER TRANSFERING METHOD AND APPARATUS THEREOF IN THE CARRIERLESS WAFER TREATING MACHINE,申请号KR19920004656-传众专利搜索

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发明名称	WAFER TRANSFERING METHOD AND APPARATUS THEREOF IN THE CARRIERLESS WAFER TREATING MACHINE
摘要
申请公布号	KR960008905(B1)	申请公布日期	1996.07.05
申请号	KR19920004656	申请日期	1992.03.20
申请人	DAINIPPON SCREEN SEIJO K.K.	发明人	GOMADA, SYUNSAKU;SIMA, YASMASA;GOHARA, SIGERU;OHASI, YASHIKO
分类号	H01L21/30;B65G49/07;H01L21/027;H01L21/304;H01L21/306;H01L21/677;(IPC1-7):H01L21/324	主分类号	H01L21/30
代理机构		代理人
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地址

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