| 摘要 |
PURPOSE: To improve the operability and reliability by providing two oscillating mirrors having an orthogonal oscillating shaft, switching a vibratory phase difference between galvanometers for driving and thereby simultaneously providing both functions of spin and scan. CONSTITUTION: An incident laser beam LB is reflected and converged simultaneously with a parabolic mirror 2 and made incident on a first oscillating mirror 3. The first oscillating mirror 3 driven by a first galvanometer 7 vibrates the advancing direction of the reflected beam to the X-axis direction at a set frequency and amplitude. The same reflected beam is made incident on a second oscillating mirror 4, which, driven by a second galvanometer 8, vibrates the reflected beam in the Y-axis direction at a set phase difference and amplitude and also at the same frequency as the first oscillating mirror 3. The vibratory phase difference of the first and the second oscillating mirrors 3, 4 are switched to 0 deg., 90 deg. or 180 deg. by a controller. The surface of an object to be worked is irradiated with the laser beam LB reflected by the second oscillating mirror 4. The mirrors 3, 4 are cooled by water. |
