SCANNING TRANSMISSION ELECTRON MICROSCOPE HAVING MULTIPLE BEAMS AND POST-DETECTION IMAGE CORRECTION

摘要

Embodiments are further directed to an information processing system for generating a corrected image of a sample. The system includes a detector, a memory communicatively coupled to the detector, and a post-detection image processor communicatively coupled to the memory and the detector. The system is configured to perform a method that includes detecting, by the detector, data of a plurality of moving particles, wherein the data of the plurality of moving particles correspond to an uncorrected image of the sample, and wherein the uncorrected image includes defocus, astigmatism and spherical aberration. The method further includes generating, by the post-detection image processor, a corrected image of the sample based at least in part on processing the detected data of the plurality of moving particles.

主权项

1. An information processing system for generating a corrected image of a sample, the system comprising:
a detector; a memory communicatively coupled to the detector; and a post-detection image processor communicatively coupled to the memory and the detector; the system configured to perform a method comprising: detecting, by the detector, data of a plurality of moving particles; wherein the data of the plurality of moving particles correspond to an uncorrected image of the sample, the uncorrected image having defocus, astigmatism and spherical aberration; and generating, by the post-detection image processor, a corrected image of the sample based at least in part on processing the detected data of the plurality of moving particles.